Patent · US Expired

Gallium nitride group compound semiconductor laser diode

US5247533A · kind A · utility

190Cited by
4References
7Claims
0Family size

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Key dates

Filing dateDec 26, 1991
Grant dateSep 21, 1993
Priority date
Expiry dateDec 26, 2011

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S2304/04
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A gallium nitride group compound semiconductor laser diode includes at least one pn junction layer disposed between an n-type layer and a p-type layer. The n-type layer is formed from a gallium nitride group compound semiconductor material defined by the composition equation (Al.sub.x Ga.sub.1-x).sub.y In.sub.1-y N (where 0.ltoreq.x.ltoreq.1 and 0.ltoreq.y.ltoreq.1). The p-type layer, doped with an acceptor impurity, is obtained by electron beam irradiating a gallium nitride group compound semiconductor material defined by the composition equation (Al.sub.x' Ga.sub.1-x').sub.y' In.sub.1-y' N (where 0.ltoreq.x'.ltoreq.1, 0.ltoreq.y'.ltoreq.1, x=x' or x.noteq.x', and, y=y' or y.noteq.y'). The improved gallium nitride group semiconductor laser diode of the present invention is found to emit light in the visible short wavelength spectrum of light which includes the blue, violet and ultraviolet regions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.