Sample carriage for scanning probe microscope
US5260577A · kind A · utility
7Cited by
9References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 9, 1992 |
| Grant date | Nov 9, 1993 |
| Priority date | — |
| Expiry date | Nov 9, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A sample carriage, for receiving a sample to be scanned and positionable in a scanning probe microscope, is used for physically decoupling the sample from the scanning probe microscope assembly. The sample carriage, constructed from low thermal coefficient material, is physically decoupled by releasably clamping a sample carriage to a bridge support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.