Inventor · Delray Beach, FL, US

Robert Marshall Stowell

13Patents
6h-index
39Co-inventors
66Inventor score

Filing activity: Jun 12, 1992 → Oct 26, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US5262643A Automatic tip approach method and apparatus for scanning probe microscope Emerging Cross-Sectional Technologies 45 Expired
US5801381A Method for protecting a probe tip using active lateral scanning control Emerging Cross-Sectional Technologies 16 Expired
US5360974A Dual quad flexure scanner Physics 13 Expired
US5773824A Method for improving measurement accuracy using active lateral scanning control of a probe Emerging Cross-Sectional Technologies 9 Expired
US5260577A Sample carriage for scanning probe microscope Emerging Cross-Sectional Technologies 7 Expired
US7229339B2 CMP apparatus and method Performing Operations; Transporting 7 Expired
US10811299B2 Wafer chuck assembly Electricity 5 Active
US9988734B2 Lipseals and contact elements for semiconductor electroplating apparatuses Emerging Cross-Sectional Technologies 5 Active
US10435807B2 Lipseals and contact elements for semiconductor electroplating apparatuses Emerging Cross-Sectional Technologies 5 Active
US11512408B2 Lipseals and contact elements for semiconductor electroplating apparatuses Emerging Cross-Sectional Technologies 1 Active
US9816196B2 Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte Chemistry; Metallurgy 1 Active
US12189369B2 In-situ sensor-fusion with artificial intelligence Physics 0 Active
US12157950B2 Lipseals and contact elements for semiconductor electroplating apparatuses Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.