Automatic tip approach method and apparatus for scanning probe microscope
US5262643A · kind A · utility
45Cited by
6References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 12, 1992 |
| Grant date | Nov 16, 1993 |
| Priority date | — |
| Expiry date | Jun 12, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/851
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A non-contact, step-wise method for automatically positioning a sensing probe, having a vibrating cantilever and tip, above a target surface utilizing acoustic and Van der Waals interactions respectively during an approach method. The sensing probe is lowered to a substantially optimized tip to target surface distance. The system utilizes the interaction of forces between the vibrating cantilever and target surface to automatically position the sensing probe above the target surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.