Interface apparatus for transporting substrates between substrate processing apparatus
US5308210A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 22, 1993 |
| Grant date | May 3, 1994 |
| Priority date | — |
| Expiry date | Jun 22, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/137
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An interface apparatus for transferring substrates between processing apparatus which provide various treatments for the substrates. The interface apparatus includes a transfer mechanism which, during a normal operation, receives substrates from an upstream processing apparatus and delivers the substrates to a downstream processing apparatus. Upon occurrence of a trouble in the downstream processing apparatus, the substrates transported from the upstream processing apparatus to the transfer mechanism are deposited in a substrate storage by a depositing and fetching mechanism. After the trouble is eliminated, the transfer mechanism delivers the substrates taken out of the storage to the downstream processing apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.