Substrate transport apparatus
US5359785A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 1992 |
| Grant date | Nov 1, 1994 |
| Priority date | — |
| Expiry date | Nov 18, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A deck movable between cassettes arranged on a base for storing a plurality of substrates in multiple stages and a substrate cleaning section for cleaning the substrates, supports a substrate fetching arm for fetching the substrates from the cassettes, and a cleaned substrate depositing arm for depositing treated substrates. The depositing arm is vertically movable between a position in which a substrate supporting surface thereof is situated below a substrate supporting surface of the substrate fetching arm to render the latter operative, and a position in which the supporting surface of the depositing arm is situated above the supporting surface of the fetching arm to render the depositing arm operative.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.