Dual quad flexure scanner
US5360974A · kind A · utility
13Cited by
13References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 20, 1992 |
| Grant date | Nov 1, 1994 |
| Priority date | — |
| Expiry date | Oct 20, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dual quad flexure carriage and assembly, for receiving a sensing probe, is used for scanning the sensing probe across a target surface. The flexure carriage is a unitary structure providing flat motion for the sensing probe during the scanning procedure, while further compensating for thermal creep. The dual quad flexure assembly comprises the dual quad flexure carriage along with piezo actuators and control systems to provide highly linear orthogonal motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.