Acceleration sensor and method for manufacturing same

US5447067A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Markus Biebl · Augsburg, DE
• Thomas Scheiter · Munich, DE
• Helmut Klose · Munich, DE

Key dates

• Filing date: Mar 8, 1994
• Grant date: Sep 5, 1995
• Expiry date: Mar 8, 2014

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0814
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acceleration sensor has a proof mass attached by resilient elements, in the form of micromechanical components, in a monocrystalline silicon layer of an SOI (silicon-on-insulator) substrate, the insulator layer of the substrate being removed under the structure which is susceptible to acceleration, in order to enable free mobility of the micromechanical components. Piezoresistors are provided for detecting movement of the proof mass, the piezoresistors supplying electrical signals to an evaluation circuit.