Patent · US Expired

Recessed via apparatus for testing, burn-in, and/or programming of integrated circuit chips, and for placing solder bumps thereon

US5447264A · kind A · utility

51Cited by
18References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 1, 1994
Grant dateSep 5, 1995
Priority date
Expiry dateJul 1, 2014

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05K2203/0726
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A temporary substrate for solder bumps may be used to transfer solder bumps to a microelectronic device. The temporary substrate includes a solder nonwettable surface and a plurality of conductive vias therein. A solder bump is formed on each of the conductive vias and is electrically and mechanically connected thereto. The solder bump extends over the solder nonwettable surface to produce a solder bump cross-sectional area which is greater than the cross-sectional area of the conductive via. A microelectronic device is placed adjacent the temporary substrate with each input/output pad adjacent a respective solder bump. An electrical and mechanical connection is formed between the solder bump and the input/output pad, and the microelectronic device is separated from the temporary substrate with the solder bump remaining connected to the input/output pad. The temporary substrate can also be used for burn-in and testing of microelectronic devices and rework on multichip modules.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.