Pressure sensor

US5450754A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Markus Biebl · Augsburg, DE
• Thomas Scheiter · Munich, DE
• Helmut Klose · Munich, DE

Key dates

• Filing date: Mar 8, 1994
• Grant date: Sep 19, 1995
• Expiry date: Mar 8, 2014

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0073
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor comprises a matrix of diaphragms of polysilicon which, via a structure of electrical conductors, are arranged at an upper side of a silicon substrate for the determination of their variable electrical capacitance dependent on the pressure stressing. These diaphragms are present in at least two different sizes. Capacitances of these diaphragms of a same size are respectively connected to form a sub-unit such that basic capacitances of these sub-units are of a respectively same size.