Acceleration sensor

US5461917A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Jiri Marek · Reutlingen, DE
• Dietrich Schubert · Reutlingen, DE
• Helmut Baumann · Gomaringen, DE
• Horst Muenzel · Reutlingen, DE
• Michael Offenberg · Lörrach, DE
• Martin Willmann · Reutlingen, DE

Key dates

• Filing date: Oct 5, 1993
• Grant date: Oct 31, 1995
• Expiry date: Oct 5, 2013

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0828
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acceleration sensor and a method of making an acceleration sensor is described in which a movable sensor element is located in a hollow space formed in the middle of three silicon plates. During production, air can be removed from the hollow space through a hole in one of the two outer plates. The hole is then closed by an additional plate, which allows for a defined pressure to be set in the hollow space.