Point of use slurry dispensing system
US5478435A · kind A · utility
113Cited by
2References
16Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Dec 16, 1994 |
| Grant date | Dec 26, 1995 |
| Priority date | — |
| Expiry date | Dec 16, 2014 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01F2101/27
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A point of use slurry dispensing system with controls for dilution, temperature and oxidizer/etchant/additive infusion. A slurry in unmixed form and a diluting agent are independently pumped to a pad on a CMP tool. Liquid heaters are used to heat the slurry and the diluting agent to a desirable temperature. The actual mixing occurs at the point of use on the pad or in a dispensing line just prior to the point of use. In some instances a third independent distribution line is used to dispense an oxidizer, etchant and/or chemical additive at or near the point of use.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.