Particle detection system employing a subsystem for collecting scattered light from the particles
US5604585A · kind A · utility
62Cited by
15References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1995 |
| Grant date | Feb 18, 1997 |
| Priority date | — |
| Expiry date | Mar 31, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/956
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Light scattered from illuminated spot on a patterned wafer is first passed through a di-electric filter and then by an optical fiber bundle to a detector. The di-electric filter controls the aperture of the light that is passed to a desired azimuth angle and the optical fiber further limits the aperture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.