Alignment of a shadow frame and large flat substrates on a heated support
US5611865A · kind A · utility
69Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 14, 1996 |
| Grant date | Mar 18, 1997 |
| Priority date | — |
| Expiry date | Feb 14, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4585
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Centering pins mounted to a susceptor in a vacuum chamber align a glass substrate with respect to the susceptor on which it is supported, and with respect to a shadow frame which overlies the periphery of the substrate and protects the edge and underside of the substrate from undesired processing. Shaped pins loosely mounted in openings in the susceptor so that the pins extend above the upper surface of the susceptor support the centered glass substrate during the transporting stages, but recess into the heated susceptor during processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.