David E. Berkstresser
31Patents
14h-index
34Co-inventors
81Inventor score
Filing activity: Nov 15, 1982 → Sep 1, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5674786A | Method of heating and cooling large area glass substrates | Emerging Cross-Sectional Technologies | 184 | Expired |
| US5352294A | Alignment of a shadow frame and large flat substrates on a support | Chemistry; Metallurgy | 106 | Expired |
| US5565071A | Integrated sputtering target assembly | Electricity | 92 | Expired |
| US5607009A | Method of heating and cooling large area substrates and apparatus therefor | Emerging Cross-Sectional Technologies | 83 | Expired |
| US5433835A | Sputtering device and target with cover to hold cooling fluid | Electricity | 79 | Expired |
| US5611865A | Alignment of a shadow frame and large flat substrates on a heated support | Chemistry; Metallurgy | 69 | Expired |
| US5487822A | Integrated sputtering target assembly | Electricity | 64 | Expired |
| US5518593A | Shield configuration for vacuum chamber | Electricity | 60 | Expired |
| US5603816A | Sputtering device and target with cover to hold cooling fluid | Electricity | 52 | Expired |
| US6517303B1 | Substrate transfer shuttle | Emerging Cross-Sectional Technologies | 36 | Expired |
| US5676803A | Sputtering device | Electricity | 29 | Expired |
| US5595337A | Sputtering device and target with cover to hold cooling fluid | Electricity | 25 | Expired |
| US4526392A | Recumbent velocipede | Performing Operations; Transporting | 21 | Expired |
| US6746198B2 | Substrate transfer shuttle | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6835118B2 | Rigid plate assembly with polishing pad and method of using | Performing Operations; Transporting | 12 | Expired |
| US7497414B2 | Curved slit valve door with flexible coupling | Electricity | 11 | Active |
| US8444364B2 | Auto-sequencing multi-directional inline processing apparatus | Emerging Cross-Sectional Technologies | 9 | Active |
| US11011783B2 | Thermal and electrical management of battery packs | Emerging Cross-Sectional Technologies | 8 | Active |
| US7364496B2 | Polishing head for polishing semiconductor wafers | Performing Operations; Transporting | 7 | Active |
| US8459276B2 | Broken wafer recovery system | Electricity | 5 | Active |
| US8672603B2 | Auto-sequencing inline processing apparatus | Emerging Cross-Sectional Technologies | 4 | Active |
| US9287152B2 | Auto-sequencing multi-directional inline processing method | Emerging Cross-Sectional Technologies | 3 | Active |
| US7575220B2 | Curved slit valve door | Mechanical Engineering; Lighting; Heating | 2 | Expired |
| US7775853B2 | Configurable polishing apparatus | Performing Operations; Transporting | 2 | Active |
| US10158115B2 | Flash evaporation of solid state battery component | Emerging Cross-Sectional Technologies | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.