Barrier seal for electrostatic chuck
US5636098A · kind A · utility
49Cited by
3References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 11, 1995 |
| Grant date | Jun 3, 1997 |
| Priority date | — |
| Expiry date | May 11, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6831
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An erosion resistant electrostatic chuck 20 for holding a substrate 45 having a peripheral edge 50, in an erosive environment, comprises an electrostatic member 25 including (i) an electrode 30, and (ii) an insulator 35 covering the electrode. A barrier 55 is circumferentially disposed about the electrostatic member 25. The barrier 55 comprises a first contact surface 60 capable of being pressed against the peripheral edge 50 of the substrate 45 to form a seal around the substrate 45 to reduce exposure of the electrostatic member 25 of the chuck 20 to the erosive environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.