Process for manufacturing a sensor

US5723353A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Horst Muenzel · Reutlingen, DE
• Dietrich Schubert · Reutlingen, DE
• Alexandra Boehringer · Leonberg, DE
• Michael Offenberg · Lörrach, DE
• Klaus Heyers · Reutlingen, DE
• Markus Lutz · Palo Alto, US

Key dates

• Filing date: Feb 12, 1996
• Grant date: Mar 3, 1998
• Expiry date: Feb 12, 2016

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S148/159
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system.