Method of forming electron beam emitting tungsten filament
US5727978A · kind A · utility
4Cited by
4References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 1995 |
| Grant date | Mar 17, 1998 |
| Priority date | — |
| Expiry date | Dec 19, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J1/304
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Electron beam emitting filaments having a tip with a radius of curvature less than about 50 .ANG. are produced using focused ion beam milling. In one embodiment, platinum is deposited on a tungsten loop electron beam filament and sharpened using focused ion beam milling to a radius of curvature less than about 50 .ANG..
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.