Phase grating and method of producing phase grating

US5786931A · kind A · utility

Assignee

• JOHANNES HEIDENHAIN GmbH · DE

Inventors

• Peter Speckbacher · Kirchweidach, DE
• Georg Flatscher · Schneizlreuth, DE
• Michael Allgauer · Traunreut, DE
• Erich Bayer · Trostberg, DE
• Erwin Spanner · Traunstein, DE
• Andreas Franz · Ludwigsburg, DE

Key dates

• Filing date: Apr 8, 1996
• Grant date: Jul 28, 1998
• Expiry date: Apr 8, 2016

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S359/90
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The phase grating of the present invention includes a substrate with a reflective, continuous layer disposed thereon on which a structured spacer layer 3 of dielectric material is applied. To form a phase grating that can be used as a scale in photoelectric position measuring instruments, a further thin reflective surface layer is located solely on the reflective, continuous surfaces, parallel to the layer, of the structured spacer layer.