Method for protecting a probe tip using active lateral scanning control
US5801381A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 21, 1997 |
| Grant date | Sep 1, 1998 |
| Priority date | — |
| Expiry date | May 21, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/851
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope includes a detection mechanism producing a feedback signal indicating a condition of engagement between the scanning probe and the surface of a sample being examined. When this engagement is above a threshold level, the lateral scanning movement between the probe and sample is stopped. The scanning movement occurs in incremental movements, and a feedback signal above the threshold level indicates that, if the scanning movement were to continue, the probe could not be moved upward fast enough to prevent a crash condition between the probe and the sample surface. The scanning movement is not re-started until the feedback signal indicates that the probe has been moved far enough away from the sample surface that such a crash condition can be avoided during the next incremental movement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.