Electroless deposition equipment or apparatus and method of performing electroless deposition
US5830805A · kind A · utility
292Cited by
7References
15Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Nov 18, 1996 |
| Grant date | Nov 3, 1998 |
| Priority date | — |
| Expiry date | Nov 18, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/913
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An electroless deposition apparatus and a method of electroless deposition that uses a single process chamber for performing multiple processes by moving through the process chamber a variety of fluids one at a time in a sequential order.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.