Patent · US Expired

Electron beam emitting tungsten filament

US5864199A · kind A · utility

5Cited by
16References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 18, 1997
Grant dateJan 26, 1999
Priority date
Expiry dateAug 18, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J1/304
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Electron beam emitting filaments having a tip with a radius of curvature less than about 50 .ANG. are produced using focused ion beam milling. In one embodiment, platinum is deposited on a tungsten loop electron beam filament and sharpened using focused ion beam milling to a radius of curvature less than about 50 .ANG..

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.