Semiconductor processing systems
US5882168A · kind A · utility
17Cited by
13References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 24, 1997 |
| Grant date | Mar 16, 1999 |
| Priority date | — |
| Expiry date | Jun 24, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A processor for processing semiconductor articles, such as integrated circuit wafers, flat panel displays, semiconductor substrates, and data disks. The processor has an interface section which receives articles in article carriers. The interface section transfers the articles from carriers into processing arrays. A conveyor having an automated arm assembly moves article arrays to and between processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.