Method and apparatus for predicting failure of an eletrostatic chuck
US5886865A · kind A · utility
21Cited by
12References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 17, 1998 |
| Grant date | Mar 23, 1999 |
| Priority date | — |
| Expiry date | Mar 17, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for determining the state of contamination of an electrostatic chuck. The method consists of applying a voltage to at least one of the chuck electrodes and measuring a leakage current to any of the chuck electrodes. The measured current is compared to a first threshold value. If the measured current is greater than the first threshold value, the chuck is deemed contaminated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.