Acceleration sensor

US5959208A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Horst Muenzel · Reutlingen, DE
• Dietrich Schubert · Reutlingen, DE
• Alexandra Boehringer · Leonberg, DE
• Michael Offenberg · Lörrach, DE
• Klaus Heyers · Reutlingen, DE
• Markus Lutz · Palo Alto, US

Key dates

• Filing date: Sep 18, 1997
• Grant date: Sep 28, 1999
• Expiry date: Sep 18, 2017

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S148/159
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acceleration sensor is composed of a three layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system.