Semiconductor wafer processing system
US6014817A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 1999 |
| Grant date | Jan 18, 2000 |
| Priority date | — |
| Expiry date | Jan 13, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.