Wafer test and burn-in platform using ceramic tile supports
US6020750A · kind A · utility
25Cited by
12References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 26, 1997 |
| Grant date | Feb 1, 2000 |
| Priority date | — |
| Expiry date | Jun 26, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2886
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A plurality of multilayer glass-ceramic substrates are arranged in coplanar relationship in a tile pattern within a support platform. The glass-ceramic substrates and the support platform are both formed of materials having thermal expansion characteristics substantially equal to that of a wafer which is supported by the coplanarly aligned substrates during test and burn-in of the wafer. The present invention effectively solves the problem of providing a single large support member for wafer test and burn-in, which heretofore have been limited in mechanical properties and power capability.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.