Dual damascene process using high selectivity boundary layers
US6025259A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 1998 |
| Grant date | Feb 15, 2000 |
| Priority date | — |
| Expiry date | Jul 2, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/76813
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of manufacturing a semiconductor device with multiple dual damascene structures that maintains the maximum density. A first dual damascene structure having a first via and a first trench is formed in a first interlayer dielectric and a first etch stop layer formed on the planarized surface of the first interlayer dielectric. Two layers of interlayer dielectric separated by a second etch stop layer is formed on the surface of the first etch stop layer. A third etch stop layer is formed on the upper layer of interlayer dielectric and a first photoresist layer formed on the third etch stop layer. The photoresist layer is etched having a dimension coinciding with a width dimension of the first via. The third etch stop layer is selectively etched and the first photoresist layer removed and replaced by a second photoresist layer. The second photoresist layer is etched having a dimension coinciding with a width dimension of the first trench. The two layers of interlayer dielectric and the first, second and third etch stop layers are etched to form a second dual damascene structure having a second via and a second trench having the same dimensions as the first dual damascene struc…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.