Method for cleaning the surface of a dielectric
US6054328A · kind A · utility
2Cited by
12References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 6, 1996 |
| Grant date | Apr 25, 2000 |
| Priority date | — |
| Expiry date | Dec 6, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/682
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
This invention relates to a method for improving the chemical and electrical performance characteristics of a high dielectric constant material. The method comprises the steps of first obtaining a barium containing high dielectric constant material, the material having an upper surface and then modifying the surface chemistry of said upper surface by interacting said upper surface with a gas reactant in a closed environment. In a variant of the method, the gas reactant preferentially reacting with upper surface as compared to the bulk.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.