Acceleration sensor

US6055858A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Horst Muenzel · Reutlingen, DE
• Dietrich Schubert · Reutlingen, DE
• Alexandra Boehringer · Leonberg, DE
• Michael Offenberg · Lörrach, DE
• Klaus Heyers · Reutlingen, DE
• Markus Lutz · Palo Alto, US

Key dates

• Filing date: Jul 28, 1999
• Grant date: May 2, 2000
• Expiry date: Jul 28, 2019

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S148/159
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system. One exemplary application of the acceleration sensor includes mounting the acceleration sensor on a vibrational system of an rpm (rate-of-rotation sensor). This simplifies the manufacturing of an rpm sensor, since the vibrational system and the acceleration sensor are configured out of a three-layer system, wherein the conductor tracks are run into the frame of the rpm sensor in which the vibrational system is suspended, so as to allow excursion.