Polymer chuck with heater and method of manufacture
US6094334A · kind A · utility
49Cited by
11References
58Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 2, 1999 |
| Grant date | Jul 25, 2000 |
| Priority date | — |
| Expiry date | Mar 2, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6833
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck 20 for holding a substrate 25 in a process chamber 30 comprises an electrostatic member 115 comprising a polymer 120 covering an electrode 125, the polymer 120 having a receiving surface 135 for receiving the substrate 25. A heater 130 abutting the polymer 120 is provided to heat the substrate 25 during processing of the substrate 25. The heater 130 has a resistance that is sufficiently low to heat the substrate 25 without causing excessive thermal degradation of the polymer 120.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.