Method for manufacturing a rate-of-rotation sensor

US6117701A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Nicholas Ian Buchan · San Jose, US
• Horst Muenzel · Reutlingen, DE
• Franz Laermer · Stuttgart, DE
• Michael Offenberg · Lörrach, DE
• Udo Bischof · Wannweil, DE
• Markus Lutz · Palo Alto, US

Key dates

• Filing date: Aug 8, 1997
• Grant date: Sep 12, 2000
• Expiry date: Aug 8, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0814
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A rate-of-rotation sensor includes a three-layer system. The rate-of-rotation sensor and the conductor traces are patterned out of the third layer. The conductor traces are electrically insulated (isolated) by cutouts from other regions of the third layer and by a second electrically insulating layer from a first layer. Thus, a simple electrical contacting (configuration) is achieved that is patterned out of a three-layer system. Since the same etching process is used for the first and the third layer, an especially efficient manufacturing is possible.