Energy sensitive electrically conductive admixtures
US6132644A · kind A · utility
14Cited by
4References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 28, 1998 |
| Grant date | Oct 17, 2000 |
| Priority date | — |
| Expiry date | May 28, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention is an admixture of an electrically conductive material and an energy sensitive material resulting in a conductive energy sensitive composition. The structures are useful for lithography in microelectronic fabrication to avoid the effects of charging on resists from electron beams. The compositions are also useful in applications of scanning electron metrology and static dissipation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.