Buried trench capacitor
US6140674A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 27, 1998 |
| Grant date | Oct 31, 2000 |
| Priority date | — |
| Expiry date | Jul 27, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/401
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An integrated circuit and a method of making the same are provided. The circuit includes a substrate that has a trench formed therein defining and isolating first and second active area and an upper surface. The circuit includes a capacitor that has a first insulating layer formed in the trench, a conductor layer formed on the first insulating layer, and a second insulating layer formed on the first insulating layer that fills the trench. The conductor layer is positioned substantially at or below the upper surface. The circuit integrates trench isolation structure with a capacitor that may be used as a filter between power and ground. The method integrates capacitor formation with trench isolation formation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.