Patent · US Expired

Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope

US6167753A · kind A · utility

6Cited by
15References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 7, 1999
Grant dateJan 2, 2001
Priority date
Expiry dateJan 7, 2019

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/852
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A scanning probe microscope operates in the manner of an atomic force microscope during intermittent periods of scanning motion, in which a sample surface is driven so that a scan line on the surface is moved past a probe tip being vibrated in engagement with the surface. Between these intermittent periods of scanning motion, the vibrating probe tip is moved out of engagement with the sample surface, so that the amplitude and phase shift of probe tip vibrations are determined by the gradient of a force field extending outward from the sample surface. Such a force field is established when the probe tip is attracted by, or repelled from, a magnetic or electric field at or near the sample surface. For each sample point, the system stores data representing the height of the sample surface and the force field.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.