Apparatus and method for determining side wall profiles using a scanning probe microscope having a probe dithered in lateral directions
US6169281A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 29, 1998 |
| Grant date | Jan 2, 2001 |
| Priority date | — |
| Expiry date | Jul 29, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/852
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The probe tip of a scanning probe microscope is scanned either along an X- or Y-direction of the apparatus, or along a scan line forming an acute angle with both the X- and Y-directions. During scanning, an excitation vibration is applied in the Z-direction, perpendicular to the surface of the sample being scanned. In a first mode of operation, a dithering vibration is applied to the probe tip, along the scan line. In a second mode of operation, the probe tip is dithered in a circular motion, which is used to identify the direction in which a wall extends along the sample surface. Alternately, in a third mode of operation, the probe tip is dithered in X- and Y-directions at differing vibrational frequencies to identify this direction of a wall. When this direction is identified, the probe proceeds straight up or down the wall to obtain an accurate profile thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.