Method and system for measuring fluid volume in a photolithography track
US6176274A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 18, 1999 |
| Grant date | Jan 23, 2001 |
| Priority date | — |
| Expiry date | Jun 18, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/3071
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and system for measuring a fluid in a photolithography track is disclosed. The method includes dispensing the fluid in a photolithography track into a self-contained reservoir, and measuring the volume of the fluid using the self-contained reservoir. In a preferred embodiment, the reservoir receives the fluid from the dispenser through a drain pipe. By measuring the volume of fluid in this manner, spillage of fluid is prevented because the volume measuring apparatus in accordance with the present invention is self-contained. This prevents corrosion and other damage to the parts of the photolithography track which come into contact with the spilled fluid. With no spillage, a more consistent volume measurement is obtained. The volume measurement is also much quicker to perform than conventional methods.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.