Inventor · Fremont, CA, US

Christopher Lee Pike

18Patents
8h-index
10Co-inventors
58Inventor score

Filing activity: Feb 13, 1998 → May 21, 2001

Most-cited inventions

PatentTitleAreaCited byStatus
US6420097B1 Hardmask trim process Electricity 33 Expired
US6257446A Liquid chemical container with integrated fluid reservoir Performing Operations; Transporting 23 Expired
US6496596B1 Method for detecting and categorizing defects Physics 13 Expired
US6411378B1 Mask, structures, and method for calibration of patterned defect inspections Physics 12 Expired
US6240874A Integrated edge exposure and hot/cool plate for a wafer track system Electricity 12 Expired
US6410927B1 Semiconductor wafer alignment method using an identification scribe Electricity 11 Expired
US6479879B1 Low defect organic BARC coating in a semiconductor structure Electricity 9 Expired
US5940651A Drip catching apparatus for receiving excess photoresist developer solution Physics 8 Expired
US6475905B1 Optimization of organic bottom anti-reflective coating (BARC) thickness for dual damascene process Electricity 7 Expired
US6100505A Hotplate offset ring Electricity 6 Expired
US6796517B1 Apparatus for the application of developing solution to a semiconductor wafer Performing Operations; Transporting 5 Expired
US6174632A Wafer defect detection method utilizing wafer with development residue attracting area Physics 3 Expired
US6281130A Method for developing ultra-thin resist films Emerging Cross-Sectional Technologies 3 Expired
US6642152B1 Method for ultra thin resist linewidth reduction using implantation Electricity 1 Expired
US6217936A Semiconductor fabrication extended particle collection cup Performing Operations; Transporting 1 Expired
US6326319A Method for coating ultra-thin resist films Electricity 1 Expired
US6288411A Defect collecting structures for photolithography Electricity 0 Expired
US6176274A Method and system for measuring fluid volume in a photolithography track Physics 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.