Heating apparatus for heating an object to be processed
US6185370A · kind A · utility
20Cited by
4References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 9, 1999 |
| Grant date | Feb 6, 2001 |
| Priority date | — |
| Expiry date | Sep 9, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67109
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An exhaust hole has a size covering not only a first region above a hot plate but also a second region surrounding the first region. A plate ember with a plurality of openings is disposed at the mouth of the exhaust hole. The exhaust hole exhausts air from the first region and the second region, even when the heat processing is not performed. Therefore, a solvent volatilized in the first region is also exhausted from the second region and will not leak outside the apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.