Mitsuhiro Tanoue
8Patents
8h-index
9Co-inventors
54Inventor score
Filing activity: Sep 9, 1999 → Apr 12, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6474986B2 | Hot plate cooling method and heat processing apparatus | Mechanical Engineering; Lighting; Heating | 41 | Expired |
| US6534750B1 | Heat treatment unit and heat treatment method | Electricity | 26 | Expired |
| US6185370A | Heating apparatus for heating an object to be processed | Electricity | 20 | Expired |
| US7661894B2 | Coating and developing apparatus, and coating and developing method | Electricity | 19 | Active |
| US6450805B1 | Hot plate cooling method and heat processing apparatus | Electricity | 18 | Expired |
| US6815647B2 | Heat treatment unit and heat treatment method | Electricity | 14 | Expired |
| US7836845B2 | Substrate carrying and processing apparatus | Emerging Cross-Sectional Technologies | 13 | Active |
| US6551448B2 | Heat processing apparatus of substrate | Electricity | 13 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.