Eiichi Sekimoto
12Patents
4h-index
21Co-inventors
60Inventor score
Filing activity: Sep 9, 1999 → Nov 5, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6185370A | Heating apparatus for heating an object to be processed | Electricity | 20 | Expired |
| US6573031B2 | Apparatus and method of thermal processing and method of pattern formation | Physics | 16 | Expired |
| US6659661B2 | Substrate processing apparatus | Electricity | 16 | Expired |
| US7868270B2 | Temperature control for performing heat process in coating/developing system for resist film | Electricity | 4 | Active |
| US7755003B2 | Temperature control for performing heat process on resist film | Electricity | 3 | Active |
| US11469116B2 | Substrate processing apparatus and substrate processing method | Electricity | 2 | Active |
| US11612017B2 | Substrate processing apparatus and substrate processing method | Electricity | 1 | Active |
| US7517217B2 | Method and apparatus for heat processing of substrate | Electricity | 1 | Active |
| US11476136B2 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Electricity | 0 | Active |
| US11087983B2 | Thermal treatment apparatus, thermal treatment method, and non-transitory computer storage medium | Electricity | 0 | Active |
| US10504757B2 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Electricity | 0 | Active |
| US6969538B2 | Method for heat processing of substrate | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.