Process for producing a speed of rotation coriolis sensor

US6214243A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Horst Muenzel · Reutlingen, DE
• Franz Laermer · Stuttgart, DE
• Michael Offenberg · Lörrach, DE
• Andrea Schilp · Schwäbisch Gmünd, DE
• Markus Lutz · Palo Alto, US

Key dates

• Filing date: Oct 20, 1998
• Grant date: Apr 10, 2001
• Expiry date: Oct 20, 2018

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/058
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A process for the manufacture of a Coriolis rate-of-rotation sensor with oscillatory support masses spring-suspended on a substrate as well as driving means for the excitation of the planar oscillation of the oscillating masses and evaluation means for the determination of a Coriolis acceleration. Oscillating masses, driving means and integrated stops are structured in a common operation by means of plasma etching from a silicon-on-insulator (SOI) wafer.