Apparatus and methods for handling a substrate

US6227585A · kind A · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Boris Govzman · Sunnyvale, US
• Konstantin Volodarsky · San Francisco, US
• Leon Volfovski · Mountain View, US

Key dates

• Filing date: Dec 4, 1998
• Grant date: May 8, 2001
• Expiry date: Dec 4, 2018

Classification

• Technology area (CPC —): General

Abstract

Substrate handling apparatus and methods are described. In one aspect, the substrate handling apparatus includes a clamping member having an extended condition wherein substrate movement relative to the transfer arm is substantially restricted and a retracted condition wherein substrate movement relative to the transfer arm is substantially free. The substrate handling apparatus further includes a sense mechanism (e.g., a vacuum sensor) constructed to determine whether a substrate is properly positioned on the support arm and to trigger the mode of operation of the clamping member between extended and retracted conditions. The sense mechanism also provides information relating to the operating condition of the clamping member.