Boris Govzman
12Patents
7h-index
16Co-inventors
63Inventor score
Filing activity: Oct 3, 1975 → Apr 12, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5957751A | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Performing Operations; Transporting | 101 | Expired |
| US6454332B1 | Apparatus and methods for handling a substrate | Emerging Cross-Sectional Technologies | 31 | Expired |
| US6474712B1 | Gripper for supporting substrate in a vertical orientation | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6386609B1 | Gripper design to reduce backlash | Performing Operations; Transporting | 22 | Expired |
| US6626476B1 | Robotic gripper apparatus | Performing Operations; Transporting | 20 | Expired |
| US6244932A | Method for detecting the presence of a substrate in a carrier head | Performing Operations; Transporting | 14 | Expired |
| US4022425A | Hydraulic control valve | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6520315B1 | Gripper assembly | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6517415B2 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Performing Operations; Transporting | 5 | Expired |
| US7059944B2 | Integrated system for processing semiconductor wafers | Emerging Cross-Sectional Technologies | 1 | Expired |
| US6227585A | Apparatus and methods for handling a substrate | General | 0 | Revoked |
| US7427337B2 | System for electropolishing and electrochemical mechanical polishing | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.