Patent · US Expired

Carrier head with pressurizable bladder

US6241593A · kind A · utility

44Cited by

16References

27Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Hung Chih Chen · San Jose, US
Steven M. Zuniga · Soquel, US
Frank Bose

Key dates

Filing date	Jul 9, 1999
Grant date	Jun 5, 2001
Priority date	—
Expiry date	Jul 9, 2019

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB24B37/30
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

Configurations within the CMP carrier head to maintain a constant contact area through which a downward pressure can be applied and distributed to the substrate for ensuring the force pressing the substrate against the pad will remain steady for each application of pressure, and for repeated application of pressure over time.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.