Frank Bose
12Patents
8h-index
15Co-inventors
69Inventor score
Filing activity: Mar 8, 1993 → Aug 12, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5401350A | Coil configurations for improved uniformity in inductively coupled plasma systems | Electricity | 268 | Expired |
| US5556549A | Power control and delivery in plasma processing equipment | Electricity | 154 | Expired |
| US5474648A | Uniform and repeatable plasma processing | Electricity | 148 | Expired |
| US5468296A | Apparatus for igniting low pressure inductively coupled plasma | Electricity | 54 | Expired |
| US5407524A | End-point detection in plasma etching by monitoring radio frequency matching network | Electricity | 47 | Expired |
| US6241593A | Carrier head with pressurizable bladder | Performing Operations; Transporting | 44 | Expired |
| US5639519A | Method for igniting low pressure inductively coupled plasma | Electricity | 23 | Expired |
| US5578165A | Coil configurations for improved uniformity in inductively coupled plasma systems | Electricity | 17 | Expired |
| US6062163A | Plasma initiating assembly | Electricity | 7 | Expired |
| US6629881B1 | Method and apparatus for controlling slurry delivery during polishing | Performing Operations; Transporting | 4 | Expired |
| US12013548B2 | Tunable prism for optical image stabilization | Physics | 0 | Active |
| US12282176B2 | Objective | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.