Qingsu Wang
14Patents
9h-index
19Co-inventors
61Inventor score
Filing activity: Jul 7, 1995 → Mar 22, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5859964A | System and method for performing real time data acquisition, process modeling and fault detection of wafer fabrication processes | Electricity | 241 | Expired |
| US5740429A | E10 reporting tool | Emerging Cross-Sectional Technologies | 104 | Expired |
| US6725402B1 | Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework | Emerging Cross-Sectional Technologies | 46 | Expired |
| US5914879A | System and method for calculating cluster tool performance metrics using a weighted configuration matrix | Emerging Cross-Sectional Technologies | 40 | Expired |
| US6268270A | Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization | Physics | 40 | Expired |
| US6532555B1 | Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework | Emerging Cross-Sectional Technologies | 39 | Expired |
| US6546508B1 | Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework | Emerging Cross-Sectional Technologies | 39 | Expired |
| US6629012B1 | Wafer-less qualification of a processing tool | Emerging Cross-Sectional Technologies | 26 | Expired |
| US6556959B1 | Method and apparatus for updating a manufacturing model based upon fault data relating to processing of semiconductor wafers | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6697691B1 | Method and apparatus for fault model analysis in manufacturing tools | Electricity | 8 | Expired |
| US6556882B1 | Method and apparatus for generating real-time data from static files | Electricity | 6 | Expired |
| US6968303B1 | Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processing | Electricity | 4 | Expired |
| US6324341A | Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization | Electricity | 4 | Expired |
| US6738731B1 | Method and apparatus for using tool state information to identify faulty wafers | Physics | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.