Developer nozzle clean combs
US6299688A · kind A · utility
0Cited by
11References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 3, 1999 |
| Grant date | Oct 9, 2001 |
| Priority date | — |
| Expiry date | Sep 3, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05B15/50
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A developer nozzle used to apply developer and other chemicals to a wafer in the processing of semiconductors is kept free of hardened developer or other chemicals by placing a comb-like device in a position that will let the comb be inserted into the spray holes of the nozzle when the nozzle is not in use. The teeth of the comb are tapered for easy insertion by the robot or other programmed device that controls motion of the nozzle. Although hardened developer is the principal concern in such processing, an appropriate comb can be used to maintain the cleanliness of other nozzles used in semiconductor processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.