Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam
US6303932A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 19, 1998 |
| Grant date | Oct 16, 2001 |
| Priority date | — |
| Expiry date | Nov 19, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A secondary charged particle image acquisition method and its apparatus for detecting a secondary charged particle image. The method includes the steps of irradiating a surface of a specimen with a focused charged particle beam and detecting a secondary charged particle emanated from the surface of the specimen, obtaining a secondary charged particle image based on the detected secondary charged particle, irradiating a positive ion beam on the surface of the specimen where the focused charged particle beam is irradiated and inducing a conductive layer on the surface of the specimen by the irradiation of the positive ion beam and diffusing an electric charge on the surface of the conductive layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.