Yuichi Hamamura
20Patents
7h-index
40Co-inventors
65Inventor score
Filing activity: Jan 27, 1997 → Dec 9, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6771077B2 | Method of testing electronic devices indicating short-circuit | Physics | 77 | Expired |
| US6303932A | Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam | Electricity | 42 | Expired |
| US5976328A | Pattern forming method using charged particle beam process and charged particle beam processing system | Electricity | 32 | Expired |
| US6960765B2 | Probe driving method, and probe apparatus | Physics | 28 | Expired |
| US5952658A | Method and system for judging milling end point for use in charged particle beam milling system | Electricity | 23 | Expired |
| US6476387B1 | Method and apparatus for observing or processing and analyzing using a charged beam | Electricity | 18 | Expired |
| US7062081B2 | Method and system for analyzing circuit pattern defects | Physics | 15 | Expired |
| US6895346B2 | Method for test conditions | Physics | 6 | Expired |
| US7301146B2 | Probe driving method, and probe apparatus | Physics | 5 | Active |
| US8995748B2 | Defect image processing apparatus, defect image processing method, semiconductor defect classifying apparatus, and semiconductor defect classifying method | Electricity | 4 | Active |
| US6780660B2 | System for testing electronic devices | Physics | 4 | Expired |
| US7945410B2 | Semiconductor device yield prediction system and method | Physics | 4 | Active |
| US6770496B2 | Method of testing electronic devices | Physics | 3 | Expired |
| US6344115B1 | Pattern forming method using charged particle beam process and charged particle beam processing system | Electricity | 3 | Expired |
| US10614391B2 | Method and apparatus for work quality control | Physics | 1 | Active |
| US7352890B2 | Method for analyzing circuit pattern defects and a system thereof | Physics | 1 | Expired |
| US8621400B2 | Method of evaluating systematic defect, and apparatus therefor | Electricity | 0 | Active |
| US8675949B2 | Reviewed defect selection processing method, defect review method, reviewed defect selection processing tool, and defect review tool | Physics | 0 | Active |
| US6841405B2 | Photomask for test wafers | Physics | 0 | Expired |
| US8612811B2 | Defective-ratio predicting method, defective-ratio predicting program, managing method for semiconductor manufacturing apparatus, and manufacturing method for semiconductor device | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.